Silicon Wafers

Silicon Wafer

 

Specifications:
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Diameter: 2”, 3”, 100 mm, 125 mm, 150 mm, 200 mm, 300 mm

Grade: Prime, Test, Monitor, Dummy, Reclaim

Growth: CZ, FZ

Type / Dopant: P/B, N/Ph, N/Sb, N/As, Undoped, Intrinsic (Only FZ)

Orientation: <100>, <111>, <111> 40 OFF, <110>

Resistivity: 0.001 – 50,000 ohm – cm

Thickness: 100 – 8,000 µm

Surface Finish: SSP, DSP, As Cut, As Lapped, Etched

Flat / Notch: SEMI Std., Single Flat, Jeida Flat, Notched, None (Round)

Glass Wafer

 

Specifications
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Diameter: 2”, 3”, 100 mm, 125 mm, 150 mm, 200 mm, 300 mm

Material: Borofloat, Fused Silica, Quartz Glass, BK7, Eagle XG, Soda Lime, B270

Thickness: ⩾ 200 µm

Surface Finish: DSP, As Lapped

Surface Quality: 20/10, 40/20, 60/40, 80/50

Surface Roughness: 6 – 10 Å

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SOI Wafer

 

Specifications
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Diameter: 3”, 100 mm, 125 mm, 150 mm, 200 mm, 300 mm

Flats: SEMI Std., Single Flat, Jeida Flat, Notched, None (Round)

Other Material: SOG, GOS

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Sapphire Wafer
Specifications:
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Diameter: 2”, 3”, 100 mm, 125 mm, 150 mm

Growth: Kyropolos, HEM

Purity: 99.99 – 99.998 %

Orientation: C- plane (0001), A- plane (11-20), R- plane (1-102), M- plane (10-10)

Surface Finish: Optical Polished, Epi-poloshed, Fine Ground, As Lapped

Surface Roughness: Polished: Ra<=0.3 nm, Fine Ground: <1 µm, As Lapped: <1 µm

Thickness: 430 ± 20, 460 ± 20, 625 ± 20

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Mask Blanks

 

Specifications:

Size: 3” x 3”, 4” x 4”, 5” x 5”, 6” x 6”

Thickness: 0.04”, 0.09”, 0.25”, 1.5”

Material: Soda Lime, Quartz

Photoresist: AZ 1518, any custom resist, No Photoresist

Other Materials

Materials: GaAs, GaP, GaSb, InAs, InP, InSb, etc

Germanium

Diameter: 2”, 3”, 100 mm

Orientation: <1-0-0>, <1-1-1>

LiNbO3

Diameter: 2″, 3″, 100 mm, 150 mm

Orientation: Y-, Z-, YZ-, and OFF-Orientations

Single Crystal Quartz

Diameter: 2″, 3″, 100 mm, 150 mm
Orientation: Y-Cut, X-Cut, AT-Cut, ST-Cut